| *Prerequisites are CHM 111-112, MTH 271-272 or MTH 173-174, PHY 170, and PHY 201-202. Presents an advanced treatment of the physical processes used in the field of microelectronics: topics include solid state materials, microelectronics devices, thermal properties of solids, conductivity in metals, lasers, semiconductors and superconductors, as well as equipment used in the manufacturing process. Includes detection systems, RF power and plasma generation, pneumatic and hydraulic actuators and sensors. Lecture 3 hours. Laboratory 3 hours. Total 6 hours per week.
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